How would you translate this to directory routes ?

Hey I have these flat routes:

- __root.tsx
- companies_.$id.agents.create.tsx
- companies_.$id.agents.tsx
- companies.create.tsx
- companies.tsx

- __root.tsx
- companies_.$id.agents.create.tsx
- companies_.$id.agents.tsx
- companies.create.tsx
- companies.tsx

- __root.tsx
- companies_.$id.agents.create.tsx
- companies_.$id.agents.tsx
- companies.create.tsx
- companies.tsx

- __root.tsx
- companies_.$id.agents.create.tsx
- companies_.$id.agents.tsx
- companies.create.tsx
- companies.tsx

How would you convert this to directory routes ? I tried but I have issues with the non-nested routes (_) not rendering in their own component tree.